Silicon Carbide (SiC) Substrate

Silicon Carbide offers unique properties which make it valuable for epitaxial growth of nitride films, high-temperature and high-voltage devices.

Silicon Carbide possesses wide band-gap, excellent thermal conductivity, high breakdown field strength, saturated electron drift velocity and good mechanical hardness.

Silicon Carbine N type
Silicon Carbide Si type

Roditi supply Silicon Carbide wafers from 2" to 6" diameter with a range of types, with our standards below.

Standard Specification

No. Item 2-4H/6H-N-SiC 3-4H-N-SiC 4-4H-N-SiC 6-4H-N-SiC
1 Material N-type SiC,High Purity Single Crystal Silicon Carbide
2 Polytype 4H/6H Single-Crystal 4H
3 Surface Orientation On axis<0001> +/- 0.5 deg Axis<0001> tilt 4/8 +/-0.5 deg toward axis<11-20>
4 Primary Flat <10-10> / <11-20> +/-5 deg
5 Primary Flat length 15.88 +/- 1.65mm 22.22 +/- 3.17mm 32.5 +/- 2.0mm 47.5 +/- 1.5mm
6 Secondary Flat length 8.0 +/- 1.65mm 11.18 +/- 1.52mm 18.0 +/- 2.0mm None
7 Diameter 50.8 +/- 0.38mm 76.2 +/- 0.38mm 100.0 +/- 0.50mm 150.0 +/- 0.25mm
8 Thickness 330/430 +/- 25um 350/432 +/- 25um 350/500 +/- 25um 350/500 +/- 25um
9 TTV ≤ 15um ≤ 25um ≤ 35um ≤ 10um
10 BOW ≤ 25um ≤ 35um ≤ 45um ≤ 60um
11 WARP ≤ 25um ≤ 35um ≤ 45um ≤ 60um
12 Double Sides Surface Si-face CMP polish,C-face optical polish / C-face CMP polish,Si-face optical polish
13 Double sides Roughness CMP polish face<0.5nm Optical polish face<1.0nm
14 Resistivity 0.013 ~ 0.028 ~ 2.5 Ω·cm (N/P-Type)
15 Micropipe Density ≤30micropipes/cm2 ≤30micropipes/cm2 ≤0~1~5~15~30/cm2 ≤1~5/cm2
16 Edge Exclusion 1mm 2mm 3mm 3mm
17 Laser Marking Front Side / Back Side or Customer's Preference
18 Appearance Cleanliness,free of foreign materials,crack,saw mark,chippings.
19 Package Packaged in a class 100 clean Room,25 pcs Epi-ready Wafer in one Multi-wafer box unless otherwise specified.
20 Remarks Customer's specification not listed above is also available and custom upon request.

The data above is representative only, with a combination of data from our suppliers, and should not be considered absolute or warrantable. Specifications will be in given in our quotations and additional information is available on request. For a quotation please do not hesitate to contact us with your specific requirements.