5600 Capacitively Coupled Plasma Option

FEATURES

  • Improved blank surface preparation
  • Direct silver plating, no flash required
  • No special process gas required

OPTION PACKAGE

  • SS antenna and distribution shields
  • Impedance matching boxes
  • Gate valve throttling kit
  • Upgraded control box PCB
  • Air bleed metering valve
  • Software
RFX-600 Power Supply required

 

Direct Silver Plating Results: SEM Analysis

  • Increased adhesion
  • Improved grain structure
With Capacitively Coupled Plasma Without Capacitively Coupled Plasma
As plated
After 150°C bakeout
  • 10KX magnification