SYSTEM CONFIGURATION • Direct Drive Roughing Pump • Light Pole • System Software • Elevator Subsystem • Computer • Two counter cards • Power Supply • Cryo Pump • Ion Gun SAUNDERS & ASSOCIATES, INC. 6300226-02 FACILITY REQUIREMENTS • Power: 208VAC 3-Phase, 7KVA, 50/60 Hz • Inlet Pressure: 90-100 PSIG
Air: 90 - 100 PSIG
Nitrogen: 70 - 100 PSIG
Process Gas: 10 PSIG
Dimensions W 53" x D 37" x H 88" MEASUREMENTS • Oscillator Frequency • Center Frequency Search on VCXO • Frequency pullability test on VCXO Software screen measurements
Measurement Frequency R
ange: 1 MHz to 300 MHz Throughput: Device Dependent S&A 5920 OSCILLATOR FINAL
FREQUENCY ADJUSTMENT SYSTEM SPECIFICATIONS • SMD Oscillator and VCXO devices are
adjusted to target frequency by Ion Beam
Etching of the electrode material • The motional parameters of the crystal remain
virtually unchanged • Sixteen parts are processed simultaneously
for high system throughput • Small crystal electrodes are as easy to
precisely adjust as large electrodes • Measured parameters are checked against
easy to define Q.C. limits • Elevator subsystem continuously
handles two magazines • Each magazine holds five transport
boats • Transport boats carry SMD devices in
two S&A pallets • SMD devices are continuously loaded,
unloaded and adjusted to frequency Magazine with tray US PATENT 6,273,991 B1